[Finetech Japan 2017] V-technology, Disclosure of FHM, feasible UHD of 738ppi

Reporter : Hana Oh(HanaOh@ubiresearch.com)

V-technology has released of FHM(Fine Hybrid Mask) which can realize UHD of 738ppi in Finetech Japan 2017 held on 5^th.

The existing FMM is made by braiding and welding. However, this method is not only difficult to manufacture, but also has difficulty in realizing a high resolution due to the structural limitations of mask such as pattern (hole) and deflection due to its own weight.

In Finetech Japan 2015, V-technology had released the concept of FMM which had improved these disadvantages. Two years later, however, it has released mass-producible a prototype of FHM (Fine Hybrid Mask) beyond the concept in 2017.

<Non-tension structured fine hybrid mask of V-technology>

FHM of V-technology adopted a different electroforming and non-tension structure than the existing FMM manufacturing method. The person concerned mentioned that this reduced the weight of the FMM to 1/10 level of that of the existing one, and solved the problem of the mask bending due to its own weight and shadow interference caused by it. Also, added that by changing the manufacturing process, the accuracy of the FMM could be increased and enabled a 738ppi UHD implementation.

V-technology has introduced the concept of Vertical deposition system which can utilize FHM in addition to FHM. This system can transport the glass substrate and FHM vertically, simultaneous deposition is possible by putting up to 2 pieces of glass substrate and FHM respectively.

Also, a V-technology official noted that the vertical deposition system reduced the spacing between source and FHM and improved step coverage and uniformity degradation due to diffuse light, and said that yield improvement is possible since it is difficult to attach the particles to the FHM or glass substrate due to the vertical type of deposition equipment.

<Concept of Vertical deposition system of V-technology>

Recently, consumers’ needs for high resolution is increasing, and as the industry is actively moving to meet this demand, attention on how FHM of V-technology will work as a solution is paid for future moves.